PTEOS,
Mark2 frame, Phase3 cassette ass'y, 21slot VME, SV21
SBC, VGA card, 3chamber system
TEOS process KIT, 150mm wafer, Alsusceptor, Lamp heated module, phase4 RF
matcher, Slit valve, Metal wafer lift, 20Torr Pressure
gauge, Heated gas line
Phase3 Robot, Bolt on lid chamber, IO slit valve, Centerfinder, 8slot storage elevator, PhaseⅢ cassette handler
Gas delivery system 12channel standard gas panel, Unit MFC, Mini
controller, PhaseⅢ hot box
Remote AC Rack
3 ENI OEM-12B RF generators
Mini controller
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